High-purity graphite is used in semiconductor crystal growth and subsequent epitaxy, ion implantation and other processes.
• Higher purity graphite and thermal insulation materials are used in the growth of semiconductor crystals to ensure the purity of the crystals. When necessary, special coatings will be added to the surface of graphite products.
• In the semiconductor epitaxy process, a precision-machined graphite base is used to carry the wafer. When necessary, graphite bases require special coatings to enhance their corrosion resistance.